@inproceedings{7f119c723b24483494b0023a9f64034b,
title = "Young's modulus of high aspect ratio Si3N4 nano-thickness membrane",
abstract = "The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano-thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young's modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself.",
keywords = "Nano membrane, Silicon nitride, Young's modulus",
author = "Chen, {Ping Hei} and Yang, {Cheng Hao} and Tsai, {Chien Ying} and Chang, {Tien Li} and Hsu, {Wei Cheng} and Chen, {Ta Chih}",
year = "2007",
doi = "10.1109/NANO.2007.4601367",
language = "English",
isbn = "1424406080",
series = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings",
pages = "1341--1344",
booktitle = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings",
note = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 ; Conference date: 02-08-2007 Through 05-08-2007",
}