Young's modulus of high aspect ratio Si3N4 nano-thickness membrane

Ping Hei Chen, Cheng Hao Yang, Chien Ying Tsai, Tien Li Chang, Wei Cheng Hsu, Ta Chih Chen

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano-thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young's modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself.

原文英語
主出版物標題2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
頁面1341-1344
頁數4
DOIs
出版狀態已發佈 - 2007 十二月 1
對外發佈Yes
事件2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 - Hong Kong, 中国
持續時間: 2007 八月 22007 八月 5

出版系列

名字2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

其他

其他2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007
國家中国
城市Hong Kong
期間07/8/207/8/5

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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