X-ray absorption spectroscopy approaches to electronic state and coordination type of lithium phosphorus oxynitride thin films

Tai Feng Hung, Hong Chang Wong, Yi Chun Tu, Chin Chang Shen, Ru Shi Liu*, Jin Ming Chen, Shu Fen Hu

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

摘要

In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li 3PO 4) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X-ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P-N valence states of hybrid orbitals were increased with increasing the nitrogen amounts.

原文英語
頁(從 - 到)1270-1274
頁數5
期刊Journal of the Chinese Chemical Society
59
發行號10
DOIs
出版狀態已發佈 - 2012 十月

ASJC Scopus subject areas

  • 化學 (全部)

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