White liglit interferometric profile measurement system using spectral coherence

Gao Wei Chang*, Yu Hsuan Lin, Zong-Mu Yeh

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

2 引文 斯高帕斯(Scopus)

摘要

It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.

原文英語
主出版物標題Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
DOIs
出版狀態已發佈 - 2007
事件Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - San Jose, CA, 美国
持續時間: 2007 一月 232007 一月 24

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
6463
ISSN(列印)0277-786X

其他

其他Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
國家/地區美国
城市San Jose, CA
期間2007/01/232007/01/24

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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