Volatile organic solvents sensing using silicon nanowires array fabricated by spontaneous electrochemical reaction

Shih Yi Chien, Hui Ling Sung, Chin Pao Cheng, Yu Man Shang, Shun Nan Lin, Jia Hao You

研究成果: 雜誌貢獻文章

摘要

In order to prevent overexposure to volatile organic solvents (VOCs), a simple sensing device with high sensitivity is needed in the common workplace. Meanwhile, silicon nanowires carrying the high surface-bulk ratio as a unique characteristic could be used for VOCs sensing. This study utilised spontaneous electrochemical reaction, which involves etching of silicon wafer in a silver nitrate and hydrofluoric acid based solution, to modify etching times for silicon nanowires fabrication. This research discovered that the length of nanowire increased and VOCs sensing sensitivity improved as the etching time increased. Furthermore, diethyl ether had the optimal performance on the effect of silicon nanowires array on VOCs sensing. The study also discussed the effect of VOCs molecules and electron distribution on silicon nanowires surface, to further investigate the impact on sensing sensitivity.

原文英語
頁(從 - 到)1119-1128
頁數10
期刊International Journal of Nanotechnology
11
發行號12
DOIs
出版狀態已發佈 - 2014

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics
  • Bioengineering

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