Volatile organic compounds sensor with stacked interdigitated electrodes coated with monolayer-protected gold nanoclusters

C. Y. Chang, C. Y. Kuo, P. K. Huang, W. C. Tian, C. J. Lu

研究成果: 書貢獻/報告類型會議論文篇章

4 引文 斯高帕斯(Scopus)

摘要

In this paper we present a complementary metal-oxide-semiconductor (CMOS) based volatile organic compounds (VOCs) sensor featured by stacked interdigitated electrodes and a polysilicon microheater. N-octanethiol functionalized gold nanoparticles (Au-C8), a type of monolayer-protected gold nanoclusters (MPCs), were employed as sensing material. The design of the sensor and the fabrication utilizing a commercial CMOS process were demonstrated. MPCs were coated by airbrushing MPCs suspension and simultaneous heating was provided by the on-chip microheater. The sensor performance was tested using octane, toluene and butanol. The responses were fast, and the sensitivity, defined as the ratio of resistance change rate (ppm) to gas concentration (ppm), was 33.1, 27.6 and 21.9 ppm/ppm for octane, toluene and butanol, respectively. Being a universal detector implicated its applicability to a gas chromatograph.

原文英語
主出版物標題2013 Transducers and Eurosensors XXVII
主出版物子標題The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
頁面1170-1173
頁數4
DOIs
出版狀態已發佈 - 2013
事件2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, 西班牙
持續時間: 2013 六月 162013 六月 20

出版系列

名字2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

其他

其他2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
國家/地區西班牙
城市Barcelona
期間2013/06/162013/06/20

ASJC Scopus subject areas

  • 硬體和架構
  • 電氣與電子工程

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