@article{01abb0811dbd42bc861fac6fdce3a77a,
title = "Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature",
abstract = "We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.",
keywords = "Gas sensor, Hydroxyl group, Metal oxide cluster, Sol-gel",
author = "Huang, {Ting Hsuan} and Li, {Pei Yi} and Yang, {Jin Bin} and Liu, {Te Yao} and Chen, {Mei Hsin} and Liu, {Po Tsun} and Meng, {Hsin Fei} and Lu, {Chia Jung} and Olivier Soppera and Yeh, {Ping Hung} and Zan, {Hsiao Wen}",
note = "Funding Information: We thank the funding from Ministry of Science and Technology , Taiwan (Project number 109-2218-E-009-012 , 108-2923-E-009-002-MY3 , 109-2112-M-032-010, 110-2112-M-032-012 , and 110-2221-E-A49-008 ). This work was supported by the Higher Education Sprout Project of the National Yang Ming Chiao Tung University and Ministry of Education (MOE), Taiwan. Publisher Copyright: {\textcopyright} 2021",
year = "2022",
month = mar,
day = "1",
doi = "10.1016/j.snb.2021.131222",
language = "English",
volume = "354",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
}