Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

Ting Hsuan Huang, Pei Yi Li, Jin Bin Yang, Te Yao Liu, Mei Hsin Chen, Po Tsun Liu, Hsin Fei Meng, Chia Jung Lu, Olivier Soppera, Ping Hung Yeh*, Hsiao Wen Zan

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

摘要

We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

原文英語
文章編號131222
期刊Sensors and Actuators, B: Chemical
354
DOIs
出版狀態已發佈 - 2022 3月 1

ASJC Scopus subject areas

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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