Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots

Chien Hung Ho*, Kan Ping Chin, Chii Rong Yang, Hsien Ming Wu, Soon Lin Chen

*此作品的通信作者

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

69 引文 斯高帕斯（Scopus）

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INIS

Material Science

Chemical Engineering

Chemistry