Two-dimensional solid-phase crystallization toward centimeter-scale monocrystalline layered MoTe2: Via two-step annealing

Chih Pin Lin, Hao Hua Hsu, Jyun Hong Huang, Yu Wei Kang, Chien Ting Wu, Yao Jen Lee, Chun Cheng Cheng, Yann Wen Lan, Wen Hao Chang, Lain Jong Li, Tuo Hung Hou*

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

摘要

The lack of effective synthesis techniques for achieving wafer-scale uniformity and high crystallinity remains one of the major obstacles for two-dimensional (2D) layered materials in practical applications. 2D solid-phase crystallization (2DSPC) is proposed based on the area-scalable and semiconductor-process-compatible sputtering and thermal annealing techniques. It successfully synthesizes few-layer 2H-MoTe2 with a monocrystalline grain size exceeding half a centimeter on an amorphous substrate of silicon dioxide. The extremely large grain size is made possible through a two-step annealing process in an inert atmosphere. The initial rapid thermal annealing at high temperatures produces hexagonal monocrystalline 2H-MoTe2 seeds with low density and the subsequent long-duration furnace annealing at low temperatures enlarges the monocrystalline domains only from the pre-existing seeds. The 2DSPC mechanism and its morphological evolution agree with the classical nucleation theory and kinetic Wulff construction theory, respectively. Our result suggests the promising potential of 2DSPC as a simple yet effective route for synthesizing future wafer-scale, high-quality 2D materials.

原文英語
頁(從 - 到)15566-15576
頁數11
期刊Journal of Materials Chemistry C
9
發行號43
DOIs
出版狀態已發佈 - 2021 11月 21

ASJC Scopus subject areas

  • 化學 (全部)
  • 材料化學

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