TiO₂ -based indium phosphide metal-oxide-semiconductor capacitor with high capacitance density

We report a low-temperature InP p-MOS with a high capacitance density of 2.7 μF/ cm² , low leakage current of 0.77 A/cm² at 1 V and tight current distribution. The high-density and low-leakage InP MOS was achieved by using high- κ TiLaO dielectric and ultra-thin SiO₂ buffer layer with a thickness of less than 0.5 nm. The obtained EOT can be aggressively scaled down to < 1 nm through the use of stacked TiLaO/SiO₂ dielectric, which has the potential for the future application of high mobility III-V CMOS devices.