TY - GEN
T1 - THz Spectroscopy as Non-destructive Alternative to Secondary Ion Mass Spectroscopy
AU - Sahoo, Anup Kumar
AU - Au, Wei Chen
AU - Yang, Chan Shan
AU - Mai, Chia Ming
AU - Pan, Ci Ling
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/11/8
Y1 - 2020/11/8
N2 - In this work, we analyzed silicon (Si) ion implanted semi-insulting gallium arsenide substrates (SI-GaAs) by using a terahertz time-domain spectroscopy (THz-TDS) system. The main goal is to determine the ion doping profile via a nondestructive approach by using THz-TDS spectroscopy. This approach will bring a new appliance to replace secondary ion mass spectroscopy (SIMS). For that, we have carried out the ion implantation experiment with an implantation energy of 200 keV at different doses. Then, we analyzed the THz-TDS experimental data of implanted SI-GaAs substrates by the Drude model to achieve depth-dependent dielectric and electrical properties at THz frequencies.
AB - In this work, we analyzed silicon (Si) ion implanted semi-insulting gallium arsenide substrates (SI-GaAs) by using a terahertz time-domain spectroscopy (THz-TDS) system. The main goal is to determine the ion doping profile via a nondestructive approach by using THz-TDS spectroscopy. This approach will bring a new appliance to replace secondary ion mass spectroscopy (SIMS). For that, we have carried out the ion implantation experiment with an implantation energy of 200 keV at different doses. Then, we analyzed the THz-TDS experimental data of implanted SI-GaAs substrates by the Drude model to achieve depth-dependent dielectric and electrical properties at THz frequencies.
UR - http://www.scopus.com/inward/record.url?scp=85103218166&partnerID=8YFLogxK
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U2 - 10.1109/IRMMW-THz46771.2020.9370878
DO - 10.1109/IRMMW-THz46771.2020.9370878
M3 - Conference contribution
AN - SCOPUS:85103218166
T3 - International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
SP - 741
EP - 742
BT - 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020
PB - IEEE Computer Society
T2 - 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020
Y2 - 8 November 2020 through 13 November 2020
ER -