Thermoelectric properties of Sb 2Te 3 thin films by electron beam evaporation

Chang Ho, Mu Jung Kao*, Cheng Hao Peng, Chin Guo Kuo, Kuohsiu David Huang


研究成果: 雜誌貢獻期刊論文同行評審

4 引文 斯高帕斯(Scopus)


This study applies the thermoelectric grains of Sb 2Te 3 on conductive glass to evaporate Sb 2Te 3 thin films by the electron beam evaporation method. Through experimental tests with different evaporation process parameters and film annealing conditions, thin films with better Seebeck coefficient, resistivity (ρ) and power fact (PF) can be obtained. Experimental results show that when thin films are annealed, their defects can be decreased accordingly, and carrier mobility can be enhanced to further elevate the conductivity of thin films. When the substrate temperature is set at 200 °C to fabricate Sb 2Te 3 thin films by the evaporation process and by annealing at 220 °C for 60 minutes, the Seebeck coefficient of Sb 2Te 3 thin films increase from 87.6 μV/K to 177.7 μV/K; resistivity falls from 6.21 mω-cm to 2.53 mω-cm and PF can achieve the maximum value of 1.24 10- 3 W/K 2 m. Finally, this study attempts to add indium (In) to Sb 2Te 3 thin films. Indium has been successfully fabricated In 3SbTe 2 thin films. This study also analyzes the effects of In on the thermoelectric properties of In 3SbTe 2 thin films.

頁(從 - 到)7491-7494
期刊Journal of Nanoscience and Nanotechnology
出版狀態已發佈 - 2011 8月

ASJC Scopus subject areas

  • 生物工程
  • 化學 (全部)
  • 生物醫學工程
  • 材料科學(全部)
  • 凝聚態物理學


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