The investigation of selective pre-pattern free self-assembled Ge nano-dot formed by excimer laser annealing

Min Hung Lee*, Pin Guang Chen

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

摘要

Localized Ge nano-dot formation by laser treatment was investigated and discussed in terms of strain distribution. The advantage of this technique is patterning localization of nano-dots without selective epitaxial growth, reducing costs and improving throughput. Self-assembled Ge nano-dots produced by excimer laser annealing statistically distributed dot density and size dependent on laser energy. Improvement in the crystallization quality of the dots was also studied, and a strain analysis was undertaken.

原文英語
文章編號307
期刊Nanoscale Research Letters
7
DOIs
出版狀態已發佈 - 2012

ASJC Scopus subject areas

  • 一般材料科學
  • 凝聚態物理學

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