The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components

Engineering

• Microelectromechanical System 100%
• Chemiresistors 100%
• Detection Limit 100%
• Carrier Gas 100%
• Monolayer 100%
• Thermostatics 100%
• Data Acquisition and Control System 100%

INIS

• evaluation 100%
• gases 100%
• mems 100%
• mixtures 33%
• computer codes 33%
• hybrids 33%
• air 33%
• control systems 33%
• detection limits 33%
• carriers 33%
• voc 33%
• data acquisition 33%