The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components

Rih Sheng Jian, Chia Jung Lu*

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

摘要

This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.

原文英語
主出版物標題14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
頁面1022-1024
頁數3
出版狀態已發佈 - 2010 十二月 1
事件14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, 荷兰
持續時間: 2010 十月 32010 十月 7

出版系列

名字14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
2

其他

其他14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
國家/地區荷兰
城市Groningen
期間2010/10/032010/10/07

ASJC Scopus subject areas

  • 控制與系統工程

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