The enhancement of MOSFET electric performance through strain engineering by refilled sige as Source and Drain

Hsin Chia Yang, Chao Wang Li, Wen Shiang Liao, Chong Kuan Du, Mu Chun Wang*, Jie Min Yang, Chun Wei Lian, Chuan Hsi Liu

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

4 引文 斯高帕斯(Scopus)

摘要

Mismatched lattice constants between SiGe and silicon can cause the strain making the mobility improved. SiGe are grown underneath the channel apparently to form global strain over the whole devices, while Source/Drain refilled with SiGe would squeeze or pull up the devices uni-axially. The ID-V G characteristics curves and the maximum trans-conductance (g m) using strain engineering are observed to be superior to the baseline. Nevertheless, the breakdown voltages with strain engineering no longer enjoy as robustly as ones without.

原文英語
主出版物標題Proceedings of the 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
頁面251-253
頁數3
DOIs
出版狀態已發佈 - 2013
事件2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 - Singapore, 新加坡
持續時間: 2013 1月 22013 1月 4

出版系列

名字Proceedings - Winter Simulation Conference
ISSN(列印)0891-7736

其他

其他2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
國家/地區新加坡
城市Singapore
期間2013/01/022013/01/04

ASJC Scopus subject areas

  • 軟體
  • 建模與模擬
  • 電腦科學應用

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