摘要
The anode hole injection oxide breakdown model based upon surface plasmons is presented. The increase in conductance at bias voltages near the surface plasmon energy is observed on metal-oxide-semiconductor capacitors. The surface plasmon excitation threshold energy decreases with increasing temperature which causes the positive charge generation to increase and the charge to breakdown to decrease. Therefore, the anode hole injection model based upon surface plasmons is a reasonable thin oxide breakdown model that confirms experimental observations.
原文 | 英語 |
---|---|
頁(從 - 到) | 57-63 |
頁數 | 7 |
期刊 | Solid-State Electronics |
卷 | 43 |
發行號 | 1 |
DOIs | |
出版狀態 | 已發佈 - 1999 |
對外發佈 | 是 |
ASJC Scopus subject areas
- 電子、光磁材料
- 凝聚態物理學
- 電氣與電子工程
- 材料化學