Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy investigation on Si-based structures for sub-micron Si-IC applications

Zhe Chuan Feng, Li Chi Cheng, Chu Wan Huang, Ying Lang Wang, T. R. Yang

    研究成果: 書貢獻/報告類型會議貢獻

    指紋 深入研究「Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy investigation on Si-based structures for sub-micron Si-IC applications」主題。共同形成了獨特的指紋。

    Engineering & Materials Science