Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen; Heh Nan Lin; Chii Ron Yang

doi:10.1063/1.1288234

Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen, Heh Nan Lin^*, Chii Ron Yang

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研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

3 引文斯高帕斯（Scopus）

摘要

We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

原文	英語
頁（從 - 到）	3953-3954
頁數	2
期刊	Review of Scientific Instruments
卷	71
發行號	10
DOIs	https://doi.org/10.1063/1.1288234
出版狀態	已發佈 - 2000 10月
對外發佈	是

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10.1063/1.1288234

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abstract = "We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.",

author = "Chen, {Sy Hann} and Lin, {Heh Nan} and Yang, {Chii Ron}",

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AB - We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

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Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

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