Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen, Heh Nan Lin, Chii Ron Yang

研究成果: 雜誌貢獻文章同行評審

7 引文 斯高帕斯(Scopus)

摘要

We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

原文英語
頁(從 - 到)3953-3954
頁數2
期刊Review of Scientific Instruments
71
發行號10
DOIs
出版狀態已發佈 - 2000 十月

ASJC Scopus subject areas

  • Instrumentation

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