Surface forming on glass material by femtosecond laser modification with HF etching process

Hung Yin Tsai*, Shao Wei Luo, Tien Li Chang

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

10 引文 斯高帕斯(Scopus)

摘要

A rapid surface-microstructuring by femtosecond laser modification without profile scanning is demonstrated on glass. The embedded grating and grid patterns are scribed inside the glass by the laser. After that, the glass is immersed in 10 wt% HF for developing. Additionally, the numerical calculation and simulation are utilized to compute the modification with etching. A fast approach to calculate the modified volume and shape by considering the fluence and material absorption is proposed. The obtained structure formed by anisotropic etching between modified and intrinsic material can be simulated for different etching selectivity. The simulated results agree well with the experimental ones.

原文英語
頁(從 - 到)205-208
頁數4
期刊CIRP Annals - Manufacturing Technology
64
發行號1
DOIs
出版狀態已發佈 - 2015

ASJC Scopus subject areas

  • 機械工業
  • 工業與製造工程

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