Study of PMMA on microstructuring as a KrF excimer laser LIGA material

C. R. Yang*, Bruce C.S. Chou, H. Y. Chou, Frank H.H. Lin, W. K. Kuo, Roger K.S. Luo, J. W. Chang, Z. J. Wei


研究成果: 雜誌貢獻會議論文同行評審

2 引文 斯高帕斯(Scopus)


PMMA (polymethyl methacrylate) has been widely used as x-ray LIGA material for its good features of electrical acid plating of all common metals to industrial applications. Unlike the tough characteristics of polyimide in almost all alkaline and acid solutions, PMMA is easily removed in chemical etchants after electroplating process. For this reason, ablation-etching characteristics of PMMA material for 3D microstructures fabrication using a 248nm KrF excimer laser were investigated. Moreover, the uses of the laminated dry film were also studied in this work. Experimental results show that PMMA microstructress can produce the near-vertical side-wall profile as the laser fluence up to 2.5 J/cm2. PMMA templates with high aspect ratio of around 25 were demonstrated, and the sequential electroplating processes have realized the metallic microstructures. Moreover, the microstructures fabricated in dry film show the perfect side-wall quality, and no residues of debris were found.

頁(從 - 到)342-348
期刊Proceedings of SPIE - The International Society for Optical Engineering
出版狀態已發佈 - 1998
事件Micromachining and Microfabrication Process Technology IV - Santa Clara, CA, 美国
持續時間: 1998 9月 211998 9月 22

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程


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