Study of metals by femtosecond laser processing for electro-optics applications

Cho Wei Chang*, Tien Li Chang, Ting Kai Tsai, Chia Jen Ting, Chien Ping Wang, Chang Pin Chou

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

1 引文 斯高帕斯(Scopus)

摘要

Femtosecond laser (FS-laser) microstructuring of metals has become a promising tool because of its non-contact nature, which allows the micromachining and direct processing of materials with a minimized volume of heat-affected zone for electro-optics applications such as light emitting diodes (LED) and solar photovoltaic (PV) lighting. This study presents ultra-short pulse (10-15 sec) FS-laser processing. Through integrating the laser source, optical system and dynamic control modules, the materials of metals with micro-scale or nano-scale structures can be fabricated. In traditional processing such as semiconductor processing, development, exposure and etching necessitate expensive equipment and time-consuming tasks. With FS-laser processing, high-precision patterns are obtained, which will be a great benefit to keeping costs down. In this study, the wavelengths of FS-laser ablation are employed using visible and infrared light. To make a breakthrough in electro-optics processes, the CIGS thin-film of solar cells in metal process can be easily produced by the FS-laser. The ablation speed of the FS-laser for thin film layer CIGS solar cells can reach 2000 mm/s which is faster than the current Nd:YAG laser machine (-1000 mm/s). On the other hand, the minimum size of metal lines can be controlled to a value that is lower than 40 μm. Furthermore, green energy can be effectively developed for the future.

原文英語
主出版物標題Proceedings of Precision Engineering and Nanotechnology
發行者Trans Tech Publications Ltd
頁面263-268
頁數6
ISBN(列印)9783037854280
DOIs
出版狀態已發佈 - 2012
事件4th International Conference of Asian Society for Precision Engineering and Nanotechnology, ASPEN 2011 - Hong Kong, 中国
持續時間: 2011 11月 162011 11月 18

出版系列

名字Key Engineering Materials
516
ISSN(列印)1013-9826
ISSN(電子)1662-9795

其他

其他4th International Conference of Asian Society for Precision Engineering and Nanotechnology, ASPEN 2011
國家/地區中国
城市Hong Kong
期間2011/11/162011/11/18

ASJC Scopus subject areas

  • 材料科學(全部)
  • 材料力學
  • 機械工業

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