Study of metals by femtosecond laser processing for electro-optics applications

Cho Wei Chang, Tien Li Chang, Ting Kai Tsai, Chia Jen Ting, Chien Ping Wang, Chang Pin Chou

研究成果: 書貢獻/報告類型會議貢獻

1 引文 斯高帕斯(Scopus)

摘要

Femtosecond laser (FS-laser) microstructuring of metals has become a promising tool because of its non-contact nature, which allows the micromachining and direct processing of materials with a minimized volume of heat-affected zone for electro-optics applications such as light emitting diodes (LED) and solar photovoltaic (PV) lighting. This study presents ultra-short pulse (10-15 sec) FS-laser processing. Through integrating the laser source, optical system and dynamic control modules, the materials of metals with micro-scale or nano-scale structures can be fabricated. In traditional processing such as semiconductor processing, development, exposure and etching necessitate expensive equipment and time-consuming tasks. With FS-laser processing, high-precision patterns are obtained, which will be a great benefit to keeping costs down. In this study, the wavelengths of FS-laser ablation are employed using visible and infrared light. To make a breakthrough in electro-optics processes, the CIGS thin-film of solar cells in metal process can be easily produced by the FS-laser. The ablation speed of the FS-laser for thin film layer CIGS solar cells can reach 2000 mm/s which is faster than the current Nd:YAG laser machine (-1000 mm/s). On the other hand, the minimum size of metal lines can be controlled to a value that is lower than 40 μm. Furthermore, green energy can be effectively developed for the future.

原文英語
主出版物標題Proceedings of Precision Engineering and Nanotechnology
發行者Trans Tech Publications Ltd
頁面263-268
頁數6
ISBN(列印)9783037854280
DOIs
出版狀態已發佈 - 2012 一月 1
事件4th International Conference of Asian Society for Precision Engineering and Nanotechnology, ASPEN 2011 - Hong Kong, 中国
持續時間: 2011 十一月 162011 十一月 18

出版系列

名字Key Engineering Materials
516
ISSN(列印)1013-9826
ISSN(電子)1662-9795

其他

其他4th International Conference of Asian Society for Precision Engineering and Nanotechnology, ASPEN 2011
國家中国
城市Hong Kong
期間11/11/1611/11/18

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • 引用此

    Chang, C. W., Chang, T. L., Tsai, T. K., Ting, C. J., Wang, C. P., & Chou, C. P. (2012). Study of metals by femtosecond laser processing for electro-optics applications. 於 Proceedings of Precision Engineering and Nanotechnology (頁 263-268). (Key Engineering Materials; 卷 516). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.516.263