@inproceedings{412a7936832a4ec8a7e81df8fcf4418e,
title = "Strained-Si:C-source/drain NMOSFETs for channel strain enhancement",
author = "Lee, {M. H.} and Chang, {S. T.} and Huang, {C. F.} and S. Maikap and Shen, {K. W.} and Syu, {R. S.} and Liu, {Y. T.}",
year = "2007",
doi = "10.1109/ISDRS.2007.4422399",
language = "English",
isbn = "1424418917",
series = "2007 International Semiconductor Device Research Symposium, ISDRS",
booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",
note = "2007 International Semiconductor Device Research Symposium, ISDRS ; Conference date: 12-12-2007 Through 14-12-2007",
}