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Simultaneous reduction and electrode patterning of TiO2/GO films via femtosecond laser for UV-enhanced flexible CO gas sensors

  • Yuan Jun Chen
  • , Tien Li Chang*
  • , Shih Feng Tseng
  • , Wen Tse Hsiao
  • , Shu Han Hsu
  • *此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

摘要

Reliable and sensitive gas sensors are essential for ensuring industrial safety and environmental monitoring. In this study, a flexible carbon monoxide (CO) gas sensor based on titanium dioxide (TiO2) and reduced graphene oxide (rGO) composite was developed for rapid and highly sensitive detection. The device was fabricated using one-step femtosecond laser (Fs-laser) processing, which simultaneously reduced a TiO2/graphene oxide (GO) thin film and patterned electrodes directly on a flexible substrate. Optimized laser parameters, including a repetition rate of 100 kHz, a scanning speed of 50 mm/sec, and a fluence of 0.34 J/cm2, enabled efficient film reduction and ensured reliable device performance. The sensor exhibited an initial response of 39.6% to CO gas at room temperature (25 °C), which was further enhanced to a maximum response of 43.8% under ultraviolet (UV) irradiation. Under 365 nm UV irradiation, the photocatalytic activity of TiO2 induced a substantial reduction in overall resistance, significantly improving the sensing capability. These findings demonstrate the potential of TiO2/rGO composite in UV-enhanced flexible CO gas sensors, and provide a promising strategy to improve sensitivity, selectivity, and stability in gas sensing applications.

原文英語
文章編號166898
期刊Applied Surface Science
737
DOIs
出版狀態已發佈 - 2026 8月 15

ASJC Scopus subject areas

  • 凝聚態物理學
  • 表面和介面
  • 表面、塗料和薄膜

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