Silicon vertical microstructure fabrication by catalytic etching

Mao Jung Huang, Chii Rong Yang, Chun Ming Chang, Nien Nan Chu, Ming Hua Shiao

研究成果: 雜誌貢獻文章同行評審

8 引文 斯高帕斯(Scopus)

指紋 深入研究「Silicon vertical microstructure fabrication by catalytic etching」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science