@inproceedings{bbf2ac546d654ed2bb77b3c6714e3b9e,
title = "Silicon nano-column fabricated by catalytic etching for electrode of fuel cell",
abstract = "With advances in fabrication technologies, a number of methods can be used to create micro/nanostructures. Herein, a simple and efficient silicon nano-column array is made through self-assembled nano-sphere lithography (SANL) and catalytic etching. Moreover, we demonstrate the ability to apply this high aspect ratio structure into fuel cell electrodes. The experimental results indicate that SANL can effectively define a nano-patterned array. The highest height of nano-column is about 10m which were formed by catalytic etching with 25 min. Furthermore, nano-column arrays with catalytic etching of and 15 min were used to produce a fuel cell electrode. Its oxidation current of 6.04 mA is 8.1 times higher than that obtained by a planar electrode.",
keywords = "catalytic etching, fuel cell, nano column",
author = "Huang, {Mao Jung} and Lin, {Chun Ting} and Chang, {Chun Ming} and Chu, {Nien Nan} and Shiao, {Ming Hua} and Yang, {Chii Rong} and Chiou, {Yuang Cherng} and Lee, {Rong Tsong}",
year = "2011",
doi = "10.1109/NEMS.2011.6017354",
language = "English",
isbn = "9781612847757",
series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
pages = "305--308",
booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",
}