Quantitative phase imaging with swept-source optical coherence tomography for optical measurement of nanostructures

Meng Tsan Tsai*, Ya Ju Lee, Yung Chi Yao, Che Yen Kung, Feng Yu Chang, Jiann Der Lee

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

8 引文 斯高帕斯(Scopus)

摘要

In this letter, a phase-sensitive, swept-source optical coherence tomography (SS-OCT) system is implemented for the optical measurement of nanostructures. A new approach is proposed to reduce the phase errors, resulting from trigger jitter of the swept source and the asynchronization between the A-scan trigger and OCT signal at the data acquisition end, with a narrowband fiber Bragg grating to generate the accurate A-scan trigger. Furthermore, combining the common-path configuration with the proposed approach, the displacement sensitivity can be calculated to be 80 pm when the swept source is operated at 30 kHz. Finally, the conducting glass was scanned with the proposed approach to quantitatively measure the thickness of conducting layer. The results show that the proposed SS-OCT approach can make be a potentially useful tool for noninvasive, real-time inspection of nanostructures.

原文英語
文章編號6140545
頁(從 - 到)640-642
頁數3
期刊IEEE Photonics Technology Letters
24
發行號8
DOIs
出版狀態已發佈 - 2012

ASJC Scopus subject areas

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

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