Promising a-Si:H TFTs with high mechanical reliability for flexible display

Min-Hung Lee, K. Y. Ho, P. C. Chen, C. C. Cheng, S. T. Chang, M. Tang, M. H. Liao, Y. H. Yeh

    研究成果: 書貢獻/報告類型會議論文篇章

    11 引文 斯高帕斯(Scopus)

    摘要

    The high mechanical reliability of a-Si:H TFTs have been fabricated on plastic substrate for flexible display applications. The promising TFT backplane has been successfully applied for AMLCD on colorless polyimide (PI) substrate. The tri-layer of Ti/Al/Ti with 10 μm width are used as scan lines and data lines to replace Cr for stress compensation, and can sustain mechanical bending cycles. The TFTs at 200°C on PI substrate have superior stability with external strain and bending cycles. The redistribution of trap states is analyzed by modeling simulation. The promising a-Si:H TFTs on PI substrate after bending cycles still have superior operation and electrical stress stability and make it possible for AMOLED applications. The Si-based TFTs with high mechanical reliability are highly potential candidate for flexible active-matrix display beyond FPD (flat panel display) generation.

    原文英語
    主出版物標題2006 International Electron Devices Meeting Technical Digest, IEDM
    DOIs
    出版狀態已發佈 - 2006 十二月 1
    事件2006 International Electron Devices Meeting, IEDM - San Francisco, CA, 美国
    持續時間: 2006 十二月 102006 十二月 13

    出版系列

    名字Technical Digest - International Electron Devices Meeting, IEDM
    ISSN(列印)0163-1918

    其他

    其他2006 International Electron Devices Meeting, IEDM
    國家/地區美国
    城市San Francisco, CA
    期間2006/12/102006/12/13

    ASJC Scopus subject areas

    • 電子、光磁材料
    • 凝聚態物理學
    • 電氣與電子工程
    • 材料化學

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