摘要
The depth profile of high resolution photoelectron spectra at Ga2O3(Gd2O3)/GaAs and Ga2O3/GaAs interfaces have been obtained by using synchrotron radiation beam and low energy Ar+ sputtering. Only one intermediary Ga oxidation state at binding energy ∼20.3 eV has been observed in the Ga2O3(Gd2O3)/GaAs sample. The data suggest that the presence of Gd stabilizes the Ga3+ oxidation state and leads to the excellent electrical insulating property of the Ga2O3(Gd2O3) film.
| 原文 | 英語 |
|---|---|
| 頁(從 - 到) | 423-426 |
| 頁數 | 4 |
| 期刊 | Solid-State Electronics |
| 卷 | 45 |
| 發行號 | 3 |
| DOIs | |
| 出版狀態 | 已發佈 - 2001 3月 |
| 對外發佈 | 是 |
ASJC Scopus subject areas
- 電子、光磁材料
- 凝聚態物理學
- 材料化學
- 電氣與電子工程
指紋
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