Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang; Chien Yu Chen; Chien Ping Wang

doi:10.1016/j.mee.2013.02.072

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang^*, Chien Yu Chen, Chien Ping Wang

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機電工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

12 引文斯高帕斯（Scopus）

摘要

This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

原文	英語
頁（從 - 到）	381-385
頁數	5
期刊	Microelectronic Engineering
卷	110
DOIs	https://doi.org/10.1016/j.mee.2013.02.072
出版狀態	已發佈 - 2013

ASJC Scopus subject areas

電子、光磁材料
原子與分子物理與光學
凝聚態物理學
表面、塗料和薄膜
電氣與電子工程

UN SDG

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10.1016/j.mee.2013.02.072

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title = "Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules",

abstract = "This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.",

keywords = "Micromachining, Photovoltaic, Renewable energy, Thin Film, Ultrafast laser",

author = "Chang, {Tien Li} and Chen, {Chien Yu} and Wang, {Chien Ping}",

year = "2013",

doi = "10.1016/j.mee.2013.02.072",

language = "English",

volume = "110",

pages = "381--385",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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T1 - Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

AU - Chang, Tien Li

AU - Chen, Chien Yu

AU - Wang, Chien Ping

PY - 2013

Y1 - 2013

N2 - This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

AB - This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

KW - Micromachining

KW - Photovoltaic

KW - Renewable energy

KW - Thin Film

KW - Ultrafast laser

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DO - 10.1016/j.mee.2013.02.072

M3 - Article

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SN - 0167-9317

VL - 110

SP - 381

EP - 385

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

摘要

ASJC Scopus subject areas

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