Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang*, Chien Yu Chen, Chien Ping Wang


研究成果: 雜誌貢獻期刊論文同行評審

12 引文 斯高帕斯(Scopus)


This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

頁(從 - 到)381-385
期刊Microelectronic Engineering
出版狀態已發佈 - 2013

ASJC Scopus subject areas

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 電氣與電子工程


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