Planarized process for resonant leaky-wave coupled phase-locked arrays of mid-IR quantum cascade lasers

C. C. Chang, J. D. Kirch, C. Boyle, C. Sigler, L. J. Mawst, D. Botez, B. Zutter, P. Buelow, K. Schulte, T. Kuech, T. Earles

研究成果: 書貢獻/報告類型會議論文篇章

2 引文 斯高帕斯(Scopus)


On-chip resonant leaky-wave coupling of quantum cascade lasers (QCLs) emitting at 8.36 μm has been realized by selective regrowth of interelement layers in curved trenches, defined by dry and wet etching. The fabricated structure provides large index steps (Î"n = 0.10) between antiguided-array element and interelement regions. In-phase-mode operation to 5.5 W front-facet emitted power in a near-diffraction-limited far-field beam pattern, with 4.5 W in the main lobe, is demonstrated. A refined fabrication process has been developed to produce phased-locked antiguided arrays of QCLs with planar geometry. The main fabrication steps in this process include non-selective regrowth of Fe:InP in interelement trenches, defined by inductive-coupled plasma (ICP) etching, a chemical polishing (CP) step to planarize the surface, non-selective regrowth of interelement layers, ICP selective etching of interelement layers, and non-selective regrowth of InP cladding layer followed by another CP step to form the element regions. This new process results in planar InGaAs/InP interelement regions, which allows for significantly improved control over the array geometry and the dimensions of element and interelement regions. Such a planar process is highly desirable to realize shorter emitting wavelength (4.6 μm) arrays, where fabrication tolerance for single-mode operation are tighter compared to 8 μm-emitting devices.

主出版物標題Novel In-Plane Semiconductor Lasers XIV
編輯Peter M. Smowton, Alexey A. Belyanin
出版狀態已發佈 - 2015
事件Novel In-Plane Semiconductor Lasers XIV - San Francisco, 美国
持續時間: 2015 2月 92015 2月 12


名字Proceedings of SPIE - The International Society for Optical Engineering


會議Novel In-Plane Semiconductor Lasers XIV
城市San Francisco

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程


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