Physical properties of polycrystalline Cr-doped SnO                         2                          films grown on glasses using reactive dc magnetron co-sputtering technique

Shiu Jen Liu; Liang Yu Chen; Chai Yun Liu; Hau Wei Fang; Jang Hsing Hsieh; Jenh Yih Juang

doi:10.1016/j.apsusc.2010.09.083

Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique

Shiu Jen Liu^*, Liang Yu Chen, Chai Yun Liu, Hau Wei Fang, Jang Hsing Hsieh, Jenh Yih Juang

^*此作品的通信作者

物理學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

29 引文斯高帕斯（Scopus）

摘要

Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO ₂ films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO ₂ films exhibit paramagnetic characteristics from room temperature down to 25 K.

原文	英語
頁（從 - 到）	2254-2258
頁數	5
期刊	Applied Surface Science
卷	257
發行號	6
DOIs	https://doi.org/10.1016/j.apsusc.2010.09.083
出版狀態	已發佈 - 2011 1月 1

ASJC Scopus subject areas

一般化學
凝聚態物理學
一般物理與天文學
表面和介面
表面、塗料和薄膜

存取文件

10.1016/j.apsusc.2010.09.083

其它文件與鏈接

Link to publication in Scopus

引用此

Liu, S. J., Chen, L. Y., Liu, C. Y., Fang, H. W., Hsieh, J. H., & Juang, J. Y. (2011). Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique Applied Surface Science, 257(6), 2254-2258. https://doi.org/10.1016/j.apsusc.2010.09.083

Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique . / Liu, Shiu Jen; Chen, Liang Yu; Liu, Chai Yun 等.
於: Applied Surface Science, 卷 257, 編號 6, 01.01.2011, p. 2254-2258.

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

Liu, SJ, Chen, LY, Liu, CY, Fang, HW, Hsieh, JH & Juang, JY 2011, ' Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique ', Applied Surface Science, 卷 257, 編號 6, 頁 2254-2258. https://doi.org/10.1016/j.apsusc.2010.09.083

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title = " Physical properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique ",

abstract = " Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.",

keywords = "Co-sputtering technique, Optoelectronic properties, Paramagnetism",

author = "Liu, {Shiu Jen} and Chen, {Liang Yu} and Liu, {Chai Yun} and Fang, {Hau Wei} and Hsieh, {Jang Hsing} and Juang, {Jenh Yih}",

note = "Funding Information: This work was supported by the National Science Council of Taiwan , R.O.C. under Grant No. NSC 98-2112-M-003-005-MY3 .",

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doi = "10.1016/j.apsusc.2010.09.083",

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AU - Liu, Shiu Jen

AU - Chen, Liang Yu

AU - Liu, Chai Yun

AU - Fang, Hau Wei

AU - Hsieh, Jang Hsing

AU - Juang, Jenh Yih

N1 - Funding Information: This work was supported by the National Science Council of Taiwan , R.O.C. under Grant No. NSC 98-2112-M-003-005-MY3 .

PY - 2011/1/1

Y1 - 2011/1/1

N2 - Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.

AB - Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.

KW - Co-sputtering technique

KW - Optoelectronic properties

KW - Paramagnetism

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Physical properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique

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ASJC Scopus subject areas

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引用此

Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique