Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Chun Chuan Yeh; Yine Huang Lai; Wen Yi Chu; Chuin Tih Yeh; Wei Hsiu Hung

doi:10.1016/j.susc.2004.06.207

Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Chun Chuan Yeh
, Yine Huang Lai
, Wen Yi Chu
, Chuin Tih Yeh
, Wei Hsiu Hung^*

^*此作品的通信作者

化學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

8 引文斯高帕斯（Scopus）

摘要

Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)₆. Mo(CO)₆ adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)₆ undergoes decarbonylation to form surface Mo(CO)_x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)_x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

原文	英語
頁（從 - 到）	81-88
頁數	8
期刊	Surface Science
卷	565
發行號	1
DOIs	https://doi.org/10.1016/j.susc.2004.06.207
出版狀態	已發佈 - 2004 9月 1

ASJC Scopus subject areas

凝聚態物理學
表面和介面
表面、塗料和薄膜
材料化學

存取文件

10.1016/j.susc.2004.06.207

其它文件與鏈接

引用此

@article{3d32f88a826d430aac2d724d910d9fb5,

title = "Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)",

abstract = "Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.",

keywords = "Chemical vapor deposition, Molybdenum, Platinum, Thermal desorption, X-ray photoelectron spectroscopy",

author = "Yeh, \{Chun Chuan\} and Lai, \{Yine Huang\} and Chu, \{Wen Yi\} and Yeh, \{Chuin Tih\} and Hung, \{Wei Hsiu\}",

note = "Funding Information: For support we thank NSRRC and National Science Council under Grant No. NSC92-2113-M-003-025.",

year = "2004",

month = sep,

day = "1",

doi = "10.1016/j.susc.2004.06.207",

language = "English",

volume = "565",

pages = "81--88",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier BV",

number = "1",

}

TY - JOUR

T1 - Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

AU - Yeh, Chun Chuan

AU - Lai, Yine Huang

AU - Chu, Wen Yi

AU - Yeh, Chuin Tih

AU - Hung, Wei Hsiu

N1 - Funding Information: For support we thank NSRRC and National Science Council under Grant No. NSC92-2113-M-003-025.

PY - 2004/9/1

Y1 - 2004/9/1

N2 - Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

AB - Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

KW - Chemical vapor deposition

KW - Molybdenum

KW - Platinum

KW - Thermal desorption

KW - X-ray photoelectron spectroscopy

UR - https://www.scopus.com/pages/publications/4344711715

UR - https://www.scopus.com/pages/publications/4344711715#tab=citedBy

U2 - 10.1016/j.susc.2004.06.207

DO - 10.1016/j.susc.2004.06.207

M3 - Article

AN - SCOPUS:4344711715

SN - 0039-6028

VL - 565

SP - 81

EP - 88

JO - Surface Science

JF - Surface Science

IS - 1

ER -

Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

摘要

ASJC Scopus subject areas

存取文件

其它文件與鏈接

指紋

引用此