Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Chun Chuan Yeh, Yine Huang Lai, Wen Yi Chu, Chuin Tih Yeh, Wei Hsiu Hung*


研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)


Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

頁(從 - 到)81-88
期刊Surface Science
出版狀態已發佈 - 2004 九月 1

ASJC Scopus subject areas

  • 凝聚態物理學
  • 表面和介面
  • 表面、塗料和薄膜
  • 材料化學


深入研究「Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)」主題。共同形成了獨特的指紋。