@inproceedings{e97ba761a3e84d9088f05a22f27e2f51,
title = "Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure",
abstract = "In this work, we investigated the photocapacitive effect of the metal-ferroelectric-insulator-semiconductor capacitors under illumination. The photocapacitive effect is mainly caused by light photon excitation, contributed from the variation of depletion charge. We suggested that the ferroelectric domains are affected by defect dipole charges formed by the interface trapped charges to lead to the variation of depletion capacitance.",
keywords = "Ferroelectric, Hafnium-zirconate, Photocapacitive effect",
author = "Liou, {Guan Lin} and Cheng, {Chun Hu} and Chiu, {Yu Chien}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017 ; Conference date: 18-10-2017 Through 20-10-2017",
year = "2017",
month = dec,
day = "1",
doi = "10.1109/EDSSC.2017.8126507",
language = "English",
series = "EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--2",
booktitle = "EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits",
}