Performance improvement of metal-insulator-metal capacitors using postmetallization-annealed treatment on the Al2O3/TiO 2/Al2O3 film

Chingchien Huang*, Chun Hu Cheng, Kaotao Lee, Bo Heng Liou

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

2 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds