Performance improvement of metal-insulator-metal capacitors using postmetallization-annealed treatment on the Al₂O₃/TiO ₂/Al₂O₃ film

Physics & Astronomy

• capacitors 84%
• insulators 71%
• metals 49%
• laminates 45%
• performance 43%
• leakage 40%
• annealing 29%
• passivity 22%
• requirements 16%

Engineering & Materials Science

• Aluminum oxide 93%
• Capacitors 77%
• Metals 62%
• Leakage currents 41%
• Annealing 38%
• Laminates 35%
• Passivation 23%
• Semiconductor materials 17%

Chemical Compounds

• Capacitor 100%
• Leakage Current 85%
• Liquid Film 47%
• Chemical Passivation 32%
• Dielectric Material 28%
• Semiconductor 24%
• Reduction 14%