Optical characterization of Ge/Si superlattices with stacked nanoripples

J. R. Lee, S. C. Lin, C. R. Lu*, J. H. Lin, C. T. Chia, H. H. Chang


研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)


Optical properties of Ge/Si superlattices grown at low temperatures with strain-induced ripple structures were characterized by electroreflectance (ER) and resonance Raman spectroscopy. There were three types of samples under investigation. The growth temperatures of the Ge layers were 250, 300, and 350 °C. The diffusion length of Ge atom at such low temperatures is considerably smaller, and three-dimensional island growth is kinetically delayed or frozen out. The cross-sectional transmission electron microscope (TEM) image of the sample showed that strain-induced Ge/Si intermixing forms stacked SiGe-alloy ripples in the Si layers to release the strain in the Ge layers. When the Ge growth temperature decreases, the spectral feature of the Ge E1 transition is shifted and enhanced because the three-dimensional island growth is kinetically suppressed, the Ge/Si intermixing formation of strain relieving stacking ripples is in favor, and the optical transition is enhanced. The same optical transition and enhancement is confirmed by the resonance Raman spectroscopy.

頁(從 - 到)490-492
期刊Journal of Physics and Chemistry of Solids
出版狀態已發佈 - 2008

ASJC Scopus subject areas

  • 化學 (全部)
  • 材料科學(全部)
  • 凝聚態物理學


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