Optical and transport properties of MOCVD-grown InSb thin films

T. R. Yang, G. Kuri, M. R. Kim, Z. C. Feng, S. J. Chua

研究成果: 雜誌貢獻會議論文同行評審

摘要

In this work we present optical investigations of metalorganic chemical vapor deposition (MOCVD) grown InSb thin films on GaAs(100) substrates and MeV ion implanted InSb(111) bulk crystals. Far-infrared (FIR) reflectance spectroscopy has been used to study the lattice vibration behavior of all the samples. For the MOCVD films the effects of III-V source ratios on the films crystalline quality have been reported. Two additional weak modes in the wavenumber regions of 210-240 cm-1 are observed and they appeared more prominent at low temperatures. Interference fringe effects modify the FIR reflectance band of the GaAs substrate. They are related to the uniformity of film thickness and crystalline perfection. The relationship between these interference features and film quality as well as thickness uniformity was obtained from the measured spectra. The carrier concentration, mobility, effective mass as well as the dielectric constant of these films have been determined. For the bulk InSb crystals, high energy C+ ions have been implanted at MeV energies and, the optical as well as transport properties of the implanted layers have been presented and discussed.

原文英語
頁(從 - 到)664-671
頁數8
期刊Proceedings of SPIE - The International Society for Optical Engineering
4078
DOIs
出版狀態已發佈 - 2000
事件Optoelectronic Materials and Devices II - Taipei, Taiwan
持續時間: 2000 七月 262000 七月 28

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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