On the electrical characteristics of ferroelectric FinFET using hafnium zirconium oxide with optimized gate stack

M. H. Lin, C. C. Fan, H. H. Hsu, C. Liu, K. M. Chen, C. H. Cheng, C. Y. Chang

研究成果: 雜誌貢獻期刊論文同行評審

6 引文 斯高帕斯(Scopus)

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Physics

Material Science