Novel methods to incorporate deuterium in the MOS structures

M. H. Lee, C. H. Lin, C. W. Liu

研究成果: 雜誌貢獻文章

6 引文 斯高帕斯(Scopus)


The deuterium concentration as high as 2 × 10 20 cm -3 can be incorporated in rapid thermal oxide layers by a process of deuterium prebake and deuterium post oxidation anneal. The deuterium distributed not only at Si/oxide interface but also in the bulk oxide. The deuterium incorporation shows the improvement on soft breakdown characteristics and the interface state density at SiO 2/Si after stress. The addition of very high vacuum prebake process yields a deuterium concentration of 9 × 10 20 cm -3, but also leads to the formation of rough oxide.

頁(從 - 到)519-521
期刊IEEE Electron Device Letters
出版狀態已發佈 - 2001 十一月 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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