Novel forming for fabrication of micro V-cut grooves using the optical-element

Ying Jui Huang*, Tien Li Chang, Hwai Pwu Chou, Fuh Yu Chang, Cheng Hsuan Lin

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

摘要

Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

原文英語
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
頁面388-389
頁數2
DOIs
出版狀態已發佈 - 2007
對外發佈
事件s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, 日本
持續時間: 2007 11月 52007 11月 8

出版系列

名字Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

其他

其他s20th International Microprocesses and Nanotechnology Conference, MNC 2007
國家/地區日本
城市Kyoto
期間2007/11/052007/11/08

ASJC Scopus subject areas

  • 硬體和架構
  • 電氣與電子工程

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