Novel forming for fabrication of micro V-cut grooves using the optical-element

Ying Jui Huang, Tien Li Chang, Hwai Pwu Chou, Fuh Yu Chang, Cheng Hsuan Lin

研究成果: 書貢獻/報告類型會議貢獻

摘要

Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

原文英語
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
頁面388-389
頁數2
DOIs
出版狀態已發佈 - 2007 十二月 1
對外發佈Yes
事件s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, 日本
持續時間: 2007 十一月 52007 十一月 8

出版系列

名字Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

其他

其他s20th International Microprocesses and Nanotechnology Conference, MNC 2007
國家日本
城市Kyoto
期間07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • 引用此

    Huang, Y. J., Chang, T. L., Chou, H. P., Chang, F. Y., & Lin, C. H. (2007). Novel forming for fabrication of micro V-cut grooves using the optical-element. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (頁 388-389). [4456267] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456267