Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

Po Yi Chang; Po Yi Chang; Po Yi Chang; Ching Fu Lin; Ching Fu Lin; Ching Fu Lin; Samer El Khoury Rouphael; Samer El Khoury Rouphael; Ting Hsuan Huang; Chang Mao Wu; Dominique Berling; Dominique Berling; Ping Hung Yeh; Chia Jung Lu; Hsin Fei Meng; Hsiao Wen Zan; Olivier Soppera; Olivier Soppera

doi:10.1021/acsami.0c03257

Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature

Po Yi Chang
, Po Yi Chang
, Po Yi Chang
, Ching Fu Lin
, Ching Fu Lin
, Ching Fu Lin
, Samer El Khoury Rouphael
, Samer El Khoury Rouphael
, Ting Hsuan Huang
, Chang Mao Wu
, Dominique Berling
, Dominique Berling
, Ping Hung Yeh
, Chia Jung Lu
, Hsin Fei Meng
, Hsiao Wen Zan^*
, Olivier Soppera^*
, Olivier Soppera^*

^*此作品的通信作者

化學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

25 引文斯高帕斯（Scopus）

摘要

A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

原文	英語
頁（從 - 到）	24984-24991
頁數	8
期刊	ACS Applied Materials and Interfaces
卷	12
發行號	22
DOIs	https://doi.org/10.1021/acsami.0c03257
出版狀態	已發佈 - 2020 6月 3

ASJC Scopus subject areas

一般材料科學

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10.1021/acsami.0c03257

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Chang, P. Y., Chang, P. Y., Chang, P. Y., Lin, C. F., Lin, C. F., Lin, C. F., El Khoury Rouphael, S., El Khoury Rouphael, S., Huang, T. H., Wu, C. M., Berling, D., Berling, D., Yeh, P. H., Lu, C. J., Meng, H. F., Zan, H. W., Soppera, O., & Soppera, O. (2020). Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature. ACS Applied Materials and Interfaces, 12(22), 24984-24991. https://doi.org/10.1021/acsami.0c03257

Chang, PY, Chang, PY, Chang, PY, Lin, CF, Lin, CF, Lin, CF, El Khoury Rouphael, S, El Khoury Rouphael, S, Huang, TH, Wu, CM, Berling, D, Berling, D, Yeh, PH, Lu, CJ, Meng, HF, Zan, HW, Soppera, O & Soppera, O 2020, 'Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature', ACS Applied Materials and Interfaces, 卷 12, 編號 22, 頁 24984-24991. https://doi.org/10.1021/acsami.0c03257

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title = "Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature",

abstract = "A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.",

keywords = "IZO, NIR, flexible, gas sensor, laser annealing, sol-gel",

author = "Chang, \{Po Yi\} and Chang, \{Po Yi\} and Chang, \{Po Yi\} and Lin, \{Ching Fu\} and Lin, \{Ching Fu\} and Lin, \{Ching Fu\} and \{El Khoury Rouphael\}, Samer and \{El Khoury Rouphael\}, Samer and Huang, \{Ting Hsuan\} and Wu, \{Chang Mao\} and Dominique Berling and Dominique Berling and Yeh, \{Ping Hung\} and Lu, \{Chia Jung\} and Meng, \{Hsin Fei\} and Zan, \{Hsiao Wen\} and Olivier Soppera and Olivier Soppera",

note = "Publisher Copyright: {\textcopyright} 2020 American Chemical Society.",

year = "2020",

month = jun,

day = "3",

doi = "10.1021/acsami.0c03257",

language = "English",

volume = "12",

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journal = "ACS Applied Materials and Interfaces",

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publisher = "American Chemical Society",

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AU - Chang, Po Yi

AU - Lin, Ching Fu

AU - El Khoury Rouphael, Samer

AU - Huang, Ting Hsuan

AU - Wu, Chang Mao

AU - Berling, Dominique

AU - Yeh, Ping Hung

AU - Lu, Chia Jung

AU - Meng, Hsin Fei

AU - Zan, Hsiao Wen

AU - Soppera, Olivier

PY - 2020/6/3

Y1 - 2020/6/3

N2 - A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

AB - A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

KW - IZO

KW - NIR

KW - flexible

KW - gas sensor

KW - laser annealing

KW - sol-gel

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UR - https://www.scopus.com/pages/publications/85086051306#tab=citedBy

U2 - 10.1021/acsami.0c03257

DO - 10.1021/acsami.0c03257

M3 - Article

C2 - 32367710

AN - SCOPUS:85086051306

SN - 1944-8244

VL - 12

SP - 24984

EP - 24991

JO - ACS Applied Materials and Interfaces

JF - ACS Applied Materials and Interfaces

IS - 22

ER -

Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

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Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature