Multiobjective lot scheduling and dynamic OHT routing in a 300-mm wafer fab

Jia Wei Yang*, Hsueh Chien Cheng, Tsung Che Chiang, Li Chen Fu

*此作品的通信作者

研究成果: 雜誌貢獻會議論文同行評審

15 引文 斯高帕斯(Scopus)

摘要

In this paper, we solve two problems in a 300-mm wafer fabrication facility (fab). Firstly, for the lot scheduling problem, we propose a multi-objective genetic programming based rule generator (MOGPRG) to evolve useful dispatching rules, which can provide near-optimal lot schedules concerning multiple objectives. Secondly, the overhead hoist transports (OHT) routing problem is considered. As the modern automated material handling system (AMHS) is capable of doing toolto-tool direct delivery, the congestion of OHTs may happen more often than the past. To deal with the traffic congestion in AMHS, a dynamic routing method is proposed to find the nearshortest and less-congested path for the OHT to travel along. It can reduce the traffic congestion and achieve fast lot delivery by adapting to the dynamic traffic environment. The proposed MOGPRG is integrated with the dynamic routing method to improve two fab performance metrics: mean cycle time and tardy rate. Experimental results show the effectiveness of the proposed MOGPRG and dynamic routing method.

原文英語
文章編號4811517
頁(從 - 到)1608-1613
頁數6
期刊Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
DOIs
出版狀態已發佈 - 2008
事件2008 IEEE International Conference on Systems, Man and Cybernetics, SMC 2008 - Singapore, 新加坡
持續時間: 2008 十月 122008 十月 15

ASJC Scopus subject areas

  • 電氣與電子工程
  • 控制與系統工程
  • 人機介面

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