Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

Jim Wei Wu, Kuan Chia Huang, Ming Li Chiang, Mei Yung Chen, Li Chen Fu

研究成果: 雜誌貢獻期刊論文同行評審

35 引文 斯高帕斯(Scopus)

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Physics

Engineering

Computer Science