Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

Jim Wei Wu, Kuan Chia Huang, Ming Li Chiang, Mei Yung Chen, Li Chen Fu

研究成果: 雜誌貢獻文章同行評審

29 引文 斯高帕斯(Scopus)

摘要

In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.

原文英語
文章編號6584767
頁(從 - 到)3704-3712
頁數9
期刊IEEE Transactions on Industrial Electronics
61
發行號7
DOIs
出版狀態已發佈 - 2014 七月

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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