Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses

Tien-Li Chang*

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)

摘要

This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035 nm wavelength with a pulse duration of 350 fs and a repetition rate of 100 kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5 lJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287 nm, and the pulse overlap is 75%. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FSlaser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.

原文英語
頁(從 - 到)450-456
頁數7
期刊Microelectronic Engineering
110
DOIs
出版狀態已發佈 - 2013 一月 1

ASJC Scopus subject areas

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 電氣與電子工程

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