MEMS based micromirror device for optical add/drop module

J. C. Chiou; Y. C. Lin; S. D. Wu; S. H. Lin

doi:10.1117/12.448839

MEMS based micromirror device for optical add/drop module

J. C. Chiou^*, Y. C. Lin, S. D. Wu, S. H. Lin

^*此作品的通信作者

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

2 引文斯高帕斯（Scopus）

摘要

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

原文	英語
頁（從 - 到）	82-88
頁數	7
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	4593
DOIs	https://doi.org/10.1117/12.448839
出版狀態	已發佈 - 2001
對外發佈	是
事件	Design, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, 澳大利亚持續時間: 2001 12月 17 → 2001 12月 19

ASJC Scopus subject areas

電子、光磁材料
凝聚態物理學
電腦科學應用
應用數學
電氣與電子工程

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title = "MEMS based micromirror device for optical add/drop module",

abstract = "In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.",

keywords = "Holographic gratings, OADM, Optical MEMS",

author = "Chiou, {J. C.} and Lin, {Y. C.} and Wu, {S. D.} and Lin, {S. H.}",

year = "2001",

doi = "10.1117/12.448839",

language = "English",

volume = "4593",

pages = "82--88",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "Design, Chararacterization, and Packaging for MEMS and Microelectronics II ; Conference date: 17-12-2001 Through 19-12-2001",

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TY - JOUR

T1 - MEMS based micromirror device for optical add/drop module

AU - Chiou, J. C.

AU - Lin, Y. C.

AU - Wu, S. D.

AU - Lin, S. H.

PY - 2001

Y1 - 2001

N2 - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

AB - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

KW - Holographic gratings

KW - OADM

KW - Optical MEMS

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U2 - 10.1117/12.448839

DO - 10.1117/12.448839

M3 - Conference article

AN - SCOPUS:0035770507

SN - 0277-786X

VL - 4593

SP - 82

EP - 88

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Chararacterization, and Packaging for MEMS and Microelectronics II

Y2 - 17 December 2001 through 19 December 2001

ER -

MEMS based micromirror device for optical add/drop module

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